Publication:

High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification

Date

2020

Proceedings Paper

https://doi.org/10.1117/12.2572912

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Author(s)

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Anantha, Vidyasagar

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Babulnath, Raghav

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Rajendran, Meghna

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Van den Heuvel, Dieter

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Leray, Philippe

Journal

Proceedings of SPIE

Statistics

1769 since deposited on 2021-11-02

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Acq. date: 2026-05-02