Publication:

EUV reticle print verification with advanced broadband optical wafer inspection and e-beam review systems

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2281632

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Files

37784.pdf 545.71 KB

Author(s)

De Simone, Danilo

;

Sanapala, Ravikumar

;

;

;

;

;

Anantha, Vidyasagar

;

;

Eitapence, Scott

;

Van Den Heuvel, Dieter

;

Foubert, Philippe

Metrics

1992 since deposited on 2021-10-24

Acq. date: 2025-12-12