Browsing by author "Buch, Xavier"
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LENS (Lithography Enhancement towards Nano Scale) a european project to support double exposure and double patterning technology development
Cantu, Pietro; Baldi, Livio; Piacentini, Paolo; Sytsma, Joost; Le Gratiet, Bernard; Gaugiran, Stephanie; Wong, Patrick; Miyashita, Hiroyuki; Atzei, Luisa Rita; Buch, Xavier; Verkleij, Dick; Toublan, Olivier; Perez-Murano, Francesco; Mecerreyes, David (2010) -
LENS - Lithography enhancement towards nano scale
Cantu, Pietro; Baldi, Livio; De Simone, Danilo; Piacentini, Paolo; Fliervoet, Timon; Alberga, Gerold; Le Gratiet, Bertrand; Gaugiran, Stephanie; Wong, Patrick; Miyashita, Hiroyuki; Atzei, Luisa Rita; Buch, Xavier; Verkleiji, Dick; Toublan, Olivier; Perez Murano, Francesc; Mecerreyes, David (2010) -
Patterning developments in spin-on hard mask systems for 30nm half pitch EUV technology
Truffert, Vincent; Pollentier, Ivan; Foubert, Philippe; Lazzarino, Frederic; Wilson, Chris; Ercken, Monique; Gronheid, Roel; Demuynck, Steven; Buch, Xavier; Anno, Yusuke (2012) -
Ru CMP for advanced metallization
Teugels, Lieve; Heylen, Nancy; Ridremont, Romain; van der Veen, Marleen; Yamanaka, Tatsuya; Yamada, Yuuya; Nishimura, Kouhei; Buch, Xavier; Hiro, Akito; Vega Gonzalez, Victor; Struyf, Herbert (2019-09)