Browsing by author "Besling, W.F.A."

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Characterization of TiN films deposited by atomic layer deposition

Besling, W.F.A.; Satta, Alessandra; Schuhmacher, Jörg; Beyer, Gerald; Maex, Karen; Kilpela, Olli; Sprey, Hessel (2002)
Integration of low-k dielectric films in damascene processes

Hoofman, Romano; Nguyen Hoang, Viet; Arnal, V.; Broekaart, M.; Gosset, L.G.; Besling, W.F.A.; Fayolle, M.; Iacopi, Francesca (2007)