Integration of low-k dielectric films in damascene processes

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Authors
Hoofman, Romano; Nguyen Hoang, Viet; Arnal, V.; Broekaart, M.; Gosset, L.G.; Besling, W.F.A.; Fayolle, M.; Iacopi, Francesca
Book
Dielectric Films for Advanced Microelectronics
Title
Integration of low-k dielectric films in damascene processes
Publication type
Book chapter
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