Browsing by author "Laitinen, O."

Now showing items 1-2 of 2

ALCVD hafnium silicates for low power gate stacks

Maes, Jan; Laitinen, O.; De Witte, Hilde; Deweerd, Wim; Delabie, Annelies; Conard, Thierry; Brijs, Bert; Wang, C. - G.; Velasco, H.; Wilk, G. (2004)
Nitrided hafnium silicates for gate dielectrics

Wang, C.G.; Velasco, H.; Verghese, M.; Shero, E.; Wilk, G.; Maes, Jan; Laitinen, O.; Deweerd, Wim; Delabie, Annelies; Opila, R.L.; Mathew, A.; Demirkan, K.; Morais, J.; Baumvol, I.J.R. (2004)