Nitrided hafnium silicates for gate dielectrics

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Authors
Wang, C.G.; Velasco, H.; Verghese, M.; Shero, E.; Wilk, G.; Maes, Jan; Laitinen, O.; Deweerd, Wim; Delabie, Annelies; Opila, R.L.; Mathew, A.; Demirkan, K.; Morais, J.; Baumvol, I.J.R.
Conference
AVS 51st International Symposium
Title
Nitrided hafnium silicates for gate dielectrics
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Meeting abstract
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