Publication:
Nitrided hafnium silicates for gate dielectrics
Date
| dc.contributor.author | Wang, C.G. | |
| dc.contributor.author | Velasco, H. | |
| dc.contributor.author | Verghese, M. | |
| dc.contributor.author | Shero, E. | |
| dc.contributor.author | Wilk, G. | |
| dc.contributor.author | Maes, Jan | |
| dc.contributor.author | Laitinen, O. | |
| dc.contributor.author | Deweerd, Wim | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.author | Opila, R.L. | |
| dc.contributor.author | Mathew, A. | |
| dc.contributor.author | Demirkan, K. | |
| dc.contributor.author | Morais, J. | |
| dc.contributor.author | Baumvol, I.J.R. | |
| dc.contributor.imecauthor | Maes, Jan | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-15T17:48:35Z | |
| dc.date.available | 2021-10-15T17:48:35Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9898 | |
| dc.source.beginpage | DI-MoA5 | |
| dc.source.conference | AVS 51st International Symposium | |
| dc.source.conferencedate | 14/11/2004 | |
| dc.source.conferencelocation | Anaheim, CA USA | |
| dc.title | Nitrided hafnium silicates for gate dielectrics | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |