Browsing by author "Braun, S."

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Characterization of etch residues generated on damascene structures

Le, Quoc Toan; Kesters, Els; Hoflijk, Ilse; Conard, Thierry; Shen, M.; Braun, S.; Burk, Y.; Holsteyns, Frank (2016)
Implanted photoresist remover for advanced nodes including SiGe, Ge and high k-metals

Braun, S.; Vos, Rita; Klipp, Andreas; Claes, Martine; Bittner, Christian; Albert, Johan; Horiguchi, Naoto; Struyf, Herbert (2013)