Browsing by author "Weber, U."
Now showing items 1-4 of 4
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Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric
Van Elshocht, Sven; Weber, U.; Conard, Thierry; Kaushik, Vidya; Houssa, Michel; Hyun, Sangjin; Seitzinger, Bernard; Lehnen, Peer; Schuhmacher, M.; Lindner, J.; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2005) -
HfSiO(N) composition depth profiling: can we get a quantitative answer using SIMS?
Conard, Thierry; Chen, Ping; Janssens, Tom; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Mack, P.; Weber, U.; Lehnen, P. (2005) -
Improving CMOS performance by AVD® grown high-k dielectrics and advanced metal electrodes
Weber, U.; Boissière, O.; Lindner, J.; Schuhmacher, M.; Lehnen, Peer; Manke, C.; Van Elshocht, Sven; Caymax, Matty; Cosnier, V.; McEntee, T. (2005) -
On anomalous emitter regions forming during phosphorous diffusion processing of crystalline silicon solar cells
Horzel, J.; Schum, B.; Lachowicz, A.; Rossa, J.; Vaas, K.; Jahn, M.; Gassenbauer, Y.; von Campe, H.; Boubekeur, H.; Blendin, G.; Weber, U.; Seidl, A.; Armigliato, A.; Seidel, F.; Hantschel, Thomas; Eyben, Pierre; Vinzelberg, S.; Gerstl, S.S.A.; Schmidt, W. (2010)