Browsing by author "Johanesen, Hayley"

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Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices

Johanesen, Hayley; Strauss, Michael; Kenslea, Anne; Hakala, Chris; Kwakman, Laurens; Boullart, Werner; Mertens, Hans; Siew, Yong Kong; Barla, Kathy (2019)
Statistical significance of STEM based metrology on advanced 3D transistor structures

Kwakman, Laurens; Kenslea, Anne; Johanesen, Hayley; Strauss, Michael; Boullart, Werner; Mertens, Hans; Siew, Yong Kong; Barla, Kathy (2019)