Authors

Johanesen, Hayley; Strauss, Michael; Kenslea, Anne; Hakala, Chris; Kwakman, Laurens; Boullart, Werner; Mertens, Hans; Siew, Yong Kong; Barla, Kathy

Conference

Metrology, Inspection, and Process Control for Microlithography XXXIII

Title

Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices

Publication type

Proceedings paper

Embargo date

9999-12-31