Browsing by author "Ikegami, M."
Now showing items 1-5 of 5
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Effects of mechanical stress on polycrystalline-silicon resistors
Nakabayashi, M.; Ohyama, Hidenori; Simoen, Eddy; Ikegami, M.; Claeys, Cor; Kobayashi, K.; Yoneoka, M.; Miyahara, K. (2002) -
Influence of boron implantation dose on the mechanical stress in polycrystalline silicon films
Nakabayashi, M.; Ikegami, M.; Ohyama, Hidenori; Kobauashi, K.; Yoneoka, M.; Simoen, Eddy; Claeys, Cor; Takami, Y.; Sunaga, H.; Takizawa, H. (2000) -
Mechanical stress of the electrical performance of polycrystalline-silicon resistors
Nakabayashi, N.; Ohyama, Hidenori; Simoen, Eddy; Ikegami, M.; Claeys, Cor; Kobayashi, K.; Yoneoka, M.; Miyahara, K. (2001) -
Reliability of polycrystalline silicon thin film resistors
Nakabayashi, M.; Ohyama, Hidenori; Simoen, Eddy; Ikegami, M.; Claeys, Cor; Kobayashi, K.; Yoneoka, M.; Miyahara, K. (2001) -
Reliability of polycrystalline silicon thin film resistors
Nakabayashi, M.; Ohyama, Hidenori; Simoen, Eddy; Ikegami, M.; Claeys, C.; Kobayashi, K.; Yoneoka, M.; Miyahara, K. (2001)