Reliability of polycrystalline silicon thin film resistors

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Authors

Nakabayashi, M.; Ohyama, Hidenori; Simoen, Eddy; Ikegami, M.; Claeys, Cor; Kobayashi, K.; Yoneoka, M.; Miyahara, K.

Issue

9_10

Journal

Microelectronics Reliability

Volume

41

Title

Reliability of polycrystalline silicon thin film resistors

Publication type

Journal article

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