Publication:
Reliability of polycrystalline silicon thin film resistors
Date
| dc.contributor.author | Nakabayashi, M. | |
| dc.contributor.author | Ohyama, Hidenori | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Ikegami, M. | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Kobayashi, K. | |
| dc.contributor.author | Yoneoka, M. | |
| dc.contributor.author | Miyahara, K. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T17:25:10Z | |
| dc.date.available | 2021-10-14T17:25:10Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5508 | |
| dc.source.beginpage | 1341 | |
| dc.source.endpage | 1346 | |
| dc.source.issue | 9_10 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.volume | 41 | |
| dc.title | Reliability of polycrystalline silicon thin film resistors | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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