Browsing by author "Litt, Lloyd"

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Comparisons of 9% versus 6% transmission attenuated phase shift mask for the 65nm device node

Montgomery, Patrick K.; Litt, Lloyd; Conley, Will; Lucas, Kevin; van Wingerden, Johannes; Vandenberghe, Geert; Wiaux, Vincent (2004)
Model-based design improvements for the 100nm lithography generation

Lucas, Kevin; Postnikov, Sergei; Patterson, Kyle; Yuan, Min-Chi; Thomas, Carla; Thompson, Matt; Carter, Rusty; Litt, Lloyd; Montgomery, Patrick; Wimmer, Karl (2002)