Authors

Montgomery, Patrick K.; Litt, Lloyd; Conley, Will; Lucas, Kevin; van Wingerden, Johannes; Vandenberghe, Geert; Wiaux, Vincent

Issue

2

Journal

Journal of Microlithography, Microfabrication and Microsystems

Volume

3

Title

Comparisons of 9% versus 6% transmission attenuated phase shift mask for the 65nm device node

Publication type

Journal article