Publication:
Comparisons of 9% versus 6% transmission attenuated phase shift mask for the 65nm device node
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1894 since deposited on 2021-10-15
3last month
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Acq. date: 2025-12-08
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Views
1894 since deposited on 2021-10-15
3last month
2last week
Acq. date: 2025-12-08
Citations