Browsing by author "Hüging, N."

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Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing

Mantl, S.; Holländer, B.; Hüging, N.; Luysberg, M.; Lenk, St.; Hogg, S.M.; Herzog, H.-J.; Hackbarth, T.; Loo, Roger; Bauer, M. (2003)
Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing

Mantl, S.; Holländer, B.; Hüging, N.; Luysberg, M.; Lenk, S.; Hogg, S.M.; Herzog, H.J.; Hackbarth, T.; Loo, Roger; Bauer, R. (2003)