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Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
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Authors
Mantl, S.
;
Holländer, B.
;
Hüging, N.
;
Luysberg, M.
;
Lenk, St.
;
Hogg, S.M.
;
Herzog, H.-J.
;
Hackbarth, T.
;
Loo, Roger
;
Bauer, M.
Conference
12th EURO-CVD Workshop
Title
Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
Publication type
Oral presentation
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