Browsing by author "Babu, S. V."

Now showing items 1-2 of 2

Chemical mechanical planarization of patterned InP in shallow trench isolation (STI) template structures using hydrogen peroxide-based silica slurries containing oxalic acid or citric acid

Matovu, John B.; Ong, Patrick; Teugels, Lieve; Leunissen, Peter; Babu, S. V. (2014)
Chemical mechanical polishing of Ge using colloidal silica particles and H2O2

Ong, Patrick; Peddeti, Shivaji; Leunissen, Peter; Babu, S. V. (2011)