Browsing by author "Ek Weis, Johan"

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Growth and integration of high-density CNT for BEOL interconnects

Romo Negreira, Ainhoa; Cott, Daire; Verhulst, Anne; Cruz Esconjaurequi, Santiago; Chiodarelli, Nicolo; Ek Weis, Johan; Whelan, Caroline; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan; Vereecken, Philippe (2008)
Integration of carbon nanotubes for advanced interconnects

Chiodarelli, Nicolo; Esconjauregui, Santiago Cruz; Romo Negreira, Ainhoa; Cott, Daire; Ek Weis, Johan; Richard, Olivier; Whelan, Caroline; Hantschel, Thomas; Groeseneken, Guido; De Gendt, Stefan; Vereecken, Philippe (2008)