Publication:

Growth and integration of high-density CNT for BEOL interconnects

Date

2008
Proceedings Paper
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Author(s)

Romo Negreira, Ainhoa  
;
Cott, Daire  
;
Verhulst, Anne  
;
Cruz Esconjaurequi, Santiago
;
Chiodarelli, Nicolo
;
Ek Weis, Johan
;
Whelan, Caroline
;
Groeseneken, Guido  
;
Heyns, Marc  
;
De Gendt, Stefan  
;
Vereecken, Philippe  

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1967 since deposited on 2021-10-17
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1967 since deposited on 2021-10-17
3last month
Acq. date: 2026-02-25

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