Publication:

Growth and integration of high-density CNT for BEOL interconnects

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Romo Negreira, Ainhoa  
;
Cott, Daire  
;
Verhulst, Anne  
;
Cruz Esconjaurequi, Santiago
;
Chiodarelli, Nicolo
;
Ek Weis, Johan
;
Whelan, Caroline
;
Groeseneken, Guido  
;
Heyns, Marc  
;
De Gendt, Stefan  
;
Vereecken, Philippe  

Journal

Abstract

Description

Statistics

Views

1967 since deposited on 2021-10-17
3last month
Acq. date: 2026-02-24

Citations

Statistics

Views

1967 since deposited on 2021-10-17
3last month
Acq. date: 2026-02-24

Citations