Browsing by author "Kujala, Jiri"
Now showing items 1-2 of 2
-
On the evolution of strain and electrical properties in as-grown and annealed Si:P epitaxial films for source-drain stressor applications
Dhayalan, Sathish Kumar; Kujala, Jiri; Slotte, Jonatan; Pourtois, Geoffrey; Simoen, Eddy; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Loo, Roger; Vandervorst, Wilfried (2018-04) -
On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films
Dhayalan, Sathish Kumar; Kujala, Jiri; Slotte, Jonatan; Pourtois, Geoffrey; Simoen, Eddy; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Iacovo, Serena; Stesmans, Andre; Loo, Roger; Vandervorst, Wilfried (2016)