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On the evolution of strain and electrical properties in as-grown and annealed Si:P epitaxial films for source-drain stressor applications
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1953 since deposited on 2021-10-25
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Acq. date: 2025-10-24
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Views
1953 since deposited on 2021-10-25
427item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations