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On the evolution of strain and electrical properties in as-grown and annealed Si:P epitaxial films for source-drain stressor applications
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Authors
Dhayalan, Sathish Kumar
;
Kujala, Jiri
;
Slotte, Jonatan
;
Pourtois, Geoffrey
;
Simoen, Eddy
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Shimura, Yosuke
;
Loo, Roger
;
Vandervorst, Wilfried
ISSN
2162-8769
Issue
5
Journal
ECS Journal of Solid State Science and Technology
Volume
7
Title
On the evolution of strain and electrical properties in as-grown and annealed Si:P epitaxial films for source-drain stressor applications
Publication type
Journal article
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