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On the evolution of strain and electrical properties in as-grown and annealed Si:P epitaxial films for source-drain stressor applications
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1957 since deposited on 2021-10-25
2last month
Acq. date: 2025-12-12
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Views
1957 since deposited on 2021-10-25
2last month
Acq. date: 2025-12-12
Citations