On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films

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Authors

Dhayalan, Sathish Kumar; Kujala, Jiri; Slotte, Jonatan; Pourtois, Geoffrey; Simoen, Eddy; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Iacovo, Serena; Stesmans, Andre; Loo, Roger; Vandervorst, Wilfried

ISSN

0003-6951

Issue

8

Journal

Applied Physics Letters

Volume

108

Title

On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films

Publication type

Journal article

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