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On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films

Date

2016
Journal article
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dc.contributor.authorDhayalan, Sathish Kumar
dc.contributor.authorKujala, Jiri
dc.contributor.authorSlotte, Jonatan
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorSimoen, Eddy
dc.contributor.authorRosseel, Erik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorShimura, Yosuke
dc.contributor.authorIacovo, Serena
dc.contributor.authorStesmans, Andre
dc.contributor.authorLoo, Roger
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorIacovo, Serena
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecIacovo, Serena::0000-0002-0826-9165
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-23T10:36:39Z
dc.date.available2021-10-23T10:36:39Z
dc.date.issued2016
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26557
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/108/8/10.1063/1.4942605
dc.source.beginpage82106
dc.source.issue8
dc.source.journalApplied Physics Letters
dc.source.volume108
dc.title

On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films

dc.typeJournal article
dspace.entity.typePublication
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