Browsing by author "Nguyen, A."

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Electron spin resonance analysis of sputtering-induced defects in advanced low-k insulators (k-2.0-2.5)

Stesmans, Andre; Nguyen, A.; Houssa, Michel; Afanasiev, Valeri; Tokei, Zsolt; Baklanov, Mikhaïl (2013)
High-resolution electron spin resonance analysis of ion bombardment induced defects in advanced low-k insulators (k=2.0-2.5)

Afanasiev, Valeri; Nguyen, A.; Houssa, M.; Stesmans, Andre; Tokei, Zsolt; Baklanov, Mikhaïl (2013)