Browsing by author "van Putten, Michel"

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First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials

Stortelder, Jetske; Ebeling, Robert P.; Rijnsent, Corne; van Putten, Michel; de Rooij-Lohmann, Veronique; Smit, Maximilian; Storm, Arnold J.; Koster, Norbert; Lensen, Henk A.; Philipsen, Vicky; Opsomer, Karl; Thakare, Devesh; Feigl, Torsten; Naujok, Philipp (2021)
Lifetime test on EUV photomask with EBL2

Wu, Chien-ching; Bender, Markus; Jonckheere, Rik; Scholze, Frank; Bekman, Herman; van Putten, Michel; de Zanger, Rory; Ebeling, Rob; Westerhout, Jeroen; Nicolai, Kyri; van Veldhoven, Jacqueline; de Rooij-Lohmann, Veronique; Kievit, Olaf; Deutz, Alex (2019-05)