Browsing by author "Dussart, R"

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Cryogenic etching of porous organosilicate low-k materials: reduction of plasma induced damage

Leroy, F.; Tillocher, T.; Zhang, Liping; Lefaucheux, P.; Yatsuda, K.; Maekawa, K.; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Dussart, R (2015)
Cryogenic etching processes applied to porous low-k materials using C4F8/SF6 plasmas

Leroy, F.; Zhang, Liping; Tillocher, T.; Yatsuda, K.; Maekawa, K; Nishimura, E; Lefaucheux, P; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Dussart, R (2015)