Authors

Leroy, F.; Tillocher, T.; Zhang, Liping; Lefaucheux, P.; Yatsuda, K.; Maekawa, K.; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Dussart, R

Conference

AVS 62nd International Symposium & Exhibition

Title

Cryogenic etching of porous organosilicate low-k materials: reduction of plasma induced damage

Publication type

Meeting abstract