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Cryogenic etching processes applied to porous low-k materials using C4F8/SF6 plasmas
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1961 since deposited on 2021-10-22
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Acq. date: 2025-10-24
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Views
1961 since deposited on 2021-10-22
414item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations