Browsing by author "Zhang, Can"

Carbon nanotube growth for high aspect ratio interconnect applications

Xie, Rongsie; Zhang, Can; Chen, Bingan; Zhong, Guofang; Robertson, john; van der Veen, Marleen (2012)

Carbon nanotube growth for through-silicon via applications

Xie, Rongsie; Zhang, Can; van der Veen, Marleen; Arstila, Kai; Hantschel, Thomas; Chen, Bingan; Zhong, Guofang; Robertson, John (2013)

Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

Zhang, Can; Feng, Yan; Bayer, Bernhard; Blume, Raoul; van der Veen, Marleen; Xie, Rongsi; Zhong, Guofang; Chen, Bingan; Knop-Gericke, Axel; Schlögl, Robert; Capraro, Bernard; Hofmann, Stephan; Robertson, john (2012)

Growth of carbon nanotubes as horizontal interconnects

Zhang, Can; Cott, Daire; Chiodarelli, Nicolo; Vereecken, Philippe; Robertson, john; Whelan, Caroline (2008)

Growth of vertically-aligned carbon nanotube forests on conductive cobalt disilicide support

Zhang, Can; Yan, F; Allen, C.S.; Bayer, B.C.; Hofmann, S.; Hickey, B.J.; Cott, Daire; Zhong, G.; Robertson, John (2010)

High-density growth of horizontally aligned carbon nanotubes for interconnects

Yan, F.; Zhang, Can; Cott, Daire; Robertson, John (2010)

Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach

Xie, Rongsi; Zhang, Can; Chen, Bingan; van der Veen, Marleen; Zhong, Guofang; Robertson, john (2014)