Browsing by author "Hopkins, Janet"
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Comparison between wet and dry silicon via reveal in 3D backside processing
Thomas, Dave; Hopkins, Janet; Ashraf, Huma; Patel, Jash; Ansell, Oliver; Jourdain, Anne; De Vos, Joeri; Miller, Andy; Beyne, Eric (2015) -
Extreme wafer thinning optimization for via-last applications
Jourdain, Anne; De Vos, Joeri; Inoue, Fumihiro; Rebibis, Kenneth June; Miller, Andy; Beyer, Gerald; Beyne, Eric; Walsby, Edward; Patel, Jash; Ansell, Oliver; Hopkins, Janet; Ashraf, Huma; Thomas, Dave (2016) -
Impact of backside processing on C-V characteristics of TSV capacitors in 3D stacked IC process flows
De Vos, Joeri; Stucchi, Michele; Jourdain, Anne; Beyne, Eric; Patel, Jash; Crook, Kath; Carruthers, Mark; Hopkins, Janet; Ashraf, Huma (2015)