Browsing by author "Kovalev, A."

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Effect of VUV and EUV radiation on utra low-k materials damage

Braginsky, O.; Kovalev, A.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Zyryanov, S.; Baklanov, Mikhaïl (2013)
Modification of OSG based low-k films under EUV and VUV exposure

Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.; Lopaev, D.; Kovalev, A.; Vasil'eva, A.; Proshina, O.; Braginsky, O.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl (2013)