Authors

Braginsky, O.; Kovalev, A.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Zyryanov, S.; Baklanov, Mikhaïl

Conference

Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability

Title

Effect of VUV and EUV radiation on utra low-k materials damage

Publication type

Proceedings paper