Publication:

Effect of VUV and EUV radiation on utra low-k materials damage

Date

2013
Proceedings Paper
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Author(s)

Braginsky, O.
;
Kovalev, A.
;
Lopaev, D.
;
Mankelevich, Y.
;
Proshina, O.
;
Rakhimova, T.
;
Rakhimov, A.
;
Vasilieva, A.
;
Zyryanov, S.
;
Baklanov, Mikhaïl

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Abstract

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1911 since deposited on 2021-10-21
Acq. date: 2026-02-24

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1911 since deposited on 2021-10-21
Acq. date: 2026-02-24

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