Publication:
Effect of VUV and EUV radiation on utra low-k materials damage
Date
| dc.contributor.author | Braginsky, O. | |
| dc.contributor.author | Kovalev, A. | |
| dc.contributor.author | Lopaev, D. | |
| dc.contributor.author | Mankelevich, Y. | |
| dc.contributor.author | Proshina, O. | |
| dc.contributor.author | Rakhimova, T. | |
| dc.contributor.author | Rakhimov, A. | |
| dc.contributor.author | Vasilieva, A. | |
| dc.contributor.author | Zyryanov, S. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-21T06:49:20Z | |
| dc.date.available | 2021-10-21T06:49:20Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22073 | |
| dc.identifier.url | http://journals.cambridge.org/action/di | |
| dc.source.beginpage | AA03.11 | |
| dc.source.conference | Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability | |
| dc.source.conferencedate | 1/04/2013 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Effect of VUV and EUV radiation on utra low-k materials damage | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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