Modification of OSG based low-k films under EUV and VUV exposure

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Authors
Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.; Lopaev, D.; Kovalev, A.; Vasil'eva, A.; Proshina, O.; Braginsky, O.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl
ISSN
0003-6951
Journal
Applied Physics Letters
Volume
102
Title
Modification of OSG based low-k films under EUV and VUV exposure
Publication type
Journal article
Embargo date
9999-12-31
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