Browsing by author "Hautala, John"
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SOI thickness uniformity improvement using corrective etching for silicon nano-photonic device
Selvaraja, Shankar; Rosseel, Erik; Fernandez, Luis; Tabat, Martin; Bogaerts, Wim; Hautala, John; Absil, Philippe (2011-09) -
SOI thickness uniformity improvement using wafer-scale corrective etching for silicon nano-photonic device
Selvaraja, Shankar; Rosseel, Erik; Fernandez, Luis; Tabat, Martin; Bogaerts, Wim; Hautala, John; Absil, Philippe (2011)