Authors

Selvaraja, Shankar; Rosseel, Erik; Fernandez, Luis; Tabat, Martin; Bogaerts, Wim; Hautala, John; Absil, Philippe

Conference

8th International Conference in Group IV Photonics

Title

SOI thickness uniformity improvement using corrective etching for silicon nano-photonic device

Publication type

Proceedings paper

Embargo date

9999-12-31