Publication:
SOI thickness uniformity improvement using wafer-scale corrective etching for silicon nano-photonic device
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Acq. date: 2026-10-07
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Acq. date: 2026-10-07
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1 since deposited on 2021-10-19
Acq. date: 2026-10-07
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1904 since deposited on 2021-10-19
3last month
Acq. date: 2026-10-07
Citations