Browsing by author "Voronina, Ekaterina"
Now showing items 1-6 of 6
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Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films
Zyulkov, Ivan; Madhivala, Viraj; Voronina, Ekaterina; Snelgrove, Matthew; Bogan, Justin; O'Connor, Rob; De Gendt, Stefan; Armini, Silvia (2020) -
Area-selective Ru ALD by amorphous carbon modification using H plasma: from atomistic modeling to full wafer process integration
Zyulkov, Ivan; Voronina, Ekaterina; Krishtab, Mikhail; Voloshin, Dmitry; Chan, BT; Mankelevich, Yuri; Rakhimova, Tatyana; Armini, Silvia; De Gendt, Stefan (2020) -
Dry cleaning and doping of MX2 for contact engineering
Marinov, Daniil; Ludwig, Jonathan; Chiappe, Daniele; Voronina, Ekaterina; Rakhimova, Tatyana; de Marneffe, Jean-Francois; Asselberghs, Inge; De Gendt, Stefan (2018) -
Mechanisms of hydrogen atom interactions with MoS2 monolayer
Voronina, Ekaterina; Mankelevitch, Yuri; Novikov, Lev; Rakhimova, Tatyana; Marinov, Daniil; de Marneffe, Jean-Francois (2020) -
Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers
Marinov, Daniil; de Marneffe, Jean-Francois; Smets, Quentin; Arutchelvan, Goutham; Bal, Kristof M.; Voronina, Ekaterina; Rakhimova, Tatyana; Mankelevich, Yuri; El Kazzi, Salim; Nalin Mehta, Ankit; Wyndaele, Pieter-Jan; Heyne, Markus Hartmut; Zhang, Jianran; With, Patrick C.; Banerjee, Sreetama; Neyts, Erik C.; Asselberghs, Inge; Lin, Dennis; De Gendt, Stefan (2021) -
Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes
Zyulkov, Ivan; Voronina, Ekaterina; Chan, BT; Rakhimova, Tatyana; De Gendt, Stefan; Armini, Silvia (2019)