Publication:

Dry cleaning and doping of MX2 for contact engineering

Date

2018

Meeting abstract

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Files

38875.pdf 1003.54 KB

Author(s)

Marinov, Daniil

;

Ludwig, Jonathan

;

Chiappe, Daniele

;

Voronina, Ekaterina

;

Rakhimova, Tatyana

;

de Marneffe, Jean-Francois

;

Asselberghs, Inge

;

De Gendt, Stefan

Statistics

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