Dry cleaning and doping of MX2 for contact engineering

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Author(s)

Marinov, Daniil

;

Ludwig, Jonathan

;

Chiappe, Daniele

;

Voronina, Ekaterina

;

Rakhimova, Tatyana

;

de Marneffe, Jean-Francois

;

Asselberghs, Inge

;

De Gendt, Stefan

Metrics

1951 since deposited on 2021-10-25

Acq. date: 2025-10-23