Publication:

Dry cleaning and doping of MX2 for contact engineering

Date

2018
Meeting abstract
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Author(s)

Marinov, Daniil
;
Ludwig, Jonathan  
;
Chiappe, Daniele
;
Voronina, Ekaterina
;
Rakhimova, Tatyana
;
de Marneffe, Jean-Francois  
;
Asselberghs, Inge  
;
De Gendt, Stefan  

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1952 since deposited on 2021-10-25
Acq. date: 2025-12-08

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1952 since deposited on 2021-10-25
Acq. date: 2025-12-08

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