Publication:

Dry cleaning and doping of MX2 for contact engineering

Date

2018
Meeting abstract
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-5178-6670
cris.virtual.orcid0000-0003-3775-3578
cris.virtual.orcid0000-0001-8371-3222
cris.virtualsource.departmentbce8c338-4d24-430a-a452-479a72e43639
cris.virtualsource.department1fd77399-4d0a-4004-8a7f-9634c67c90de
cris.virtualsource.department51c894df-18d8-4358-a52a-d14ab7e9edb1
cris.virtualsource.orcidbce8c338-4d24-430a-a452-479a72e43639
cris.virtualsource.orcid1fd77399-4d0a-4004-8a7f-9634c67c90de
cris.virtualsource.orcid51c894df-18d8-4358-a52a-d14ab7e9edb1
dc.contributor.authorMarinov, Daniil
dc.contributor.authorLudwig, Jonathan
dc.contributor.authorChiappe, Daniele
dc.contributor.authorVoronina, Ekaterina
dc.contributor.authorRakhimova, Tatyana
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorLudwig, Jonathan
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-25T23:00:39Z
dc.date.available2021-10-25T23:00:39Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31292
dc.identifier.urlhttps://www2.avs.org/symposium2018/ProgramBooks/ProgramBook_Session_2D+AM+EM+NS-WeM.pdf
dc.source.conferenceAVS 65th International Symposium & Exhibition
dc.source.conferencedate21/10/2018
dc.source.conferencelocationLong Beach, CA USA
dc.title

Dry cleaning and doping of MX2 for contact engineering

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
38875.pdf
Size:
1003.54 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions