Browsing by author "Lee, Yu-tsung"
Now showing items 1-4 of 4
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Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Gronheid, Roel; Rincon Delgadillo, Paulina; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Parnell, Doni; Chan, BT; Lee, Yu-tsung; Van Look, Lieve; Cao, Yi; Her, YoungJun; Lin, Guanyang; Harukawa, Ryoto; Nagaswami, Venkat; D'Urzo, Lucia; Somervell, Mark; Nealey, Paul (2014) -
High throughput grating qualification of directed self-assembly patterns using optical metrology
Van Look, Lieve; Rincon Delgadillo, Paulina; Lee, Yu-tsung; Pollentier, Ivan; Gronheid, Roel; Cao, Yi; Lin, Guanyang; Nealey, Paul F. (2014) -
High throughput grating qualification of directed self-assembly patterns using optical metrology
Van Look, Lieve; Rincon Delgadillo, Paulina; Lee, Yu-tsung; Pollentier, Ivan; Gronheid, Roel; Cao, Yi; Lin, Guanyang; Nealey, Paul F. (2013) -
Origin of defect in directed self-assembly of block copolymers using feature multiplication
Rincon Delgadillo, Paulina; Harukawa, Ryoto; Parnell, Doni; Lee, Yu-tsung; Chan, BT; Lin, Guanyang; Cao, Yi; Nagaswami, Venkat; Somervell, Mark; Nafus, Kathleen; Gronheid, Roel; Nealey, Paul (2013)