Authors

Van Look, Lieve; Rincon Delgadillo, Paulina; Lee, Yu-tsung; Pollentier, Ivan; Gronheid, Roel; Cao, Yi; Lin, Guanyang; Nealey, Paul F.

Conference

39th International Conference on Micro and Nano Engineering - MNE

Title

High throughput grating qualification of directed self-assembly patterns using optical metrology

Publication type

Oral presentation

Embargo date

9999-12-31