Publication:

Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow

Date

2014

Proceedings Paper

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Author(s)

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Rincon Delgadillo, Paulina

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Pathangi Sriraman, Hari

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Van Den Heuvel, Dieter

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Van Look, Lieve

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Harukawa, Ryoto

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Nagaswami, Venkat

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Somervell, Mark

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2028 since deposited on 2021-10-22

Acq. date: 2026-02-26